Silicone Rubber Heaters
With rugged, yet thin, lightweight silicone rubber heaters you can put the heat where
it is needed. Fiberglas-reinforced silicone rubber gives your heater dimensional
stability without sacrificing flexibility. Silicone rubber heaters are used in applications
for integrated circuit (IC) testing, vacuum chamber wall heating, wet processing
dryers and many other photovoltaic applications. The heater can be formed to fit
many custom design components within the tool and can be supplied as a thermal
assembly to reduce installation costs.
• Designed in the exact shape and size you need to provide easy installation and
temperatur
e uniformity
• Agency appr
ovals: , VDE, CE and RHoS
• Moisture and chemical-resistant material provides longer heater life
• Vulcanizing adhesives or fastener easily bond heaters to your part
• Process temperature up to 220°C (430ºF)
Features
Large Panel Thick Film Heaters
Processing requirements for solar panel and display technologies are growing in
order to increase throughput and reduce the cost of each manufactured device.
In addition to size, new processes require tools that can operate at higher, more
accurate and uniform temperatures. By using thick film technology, overall weight
of the assembly is greatly reduced. Temperature uniformity and accuracy come
from Watlow’s ability to precisely pattern and distribute the wattage of a thick film
heater circuit and to maintain flatness requirements across a very large surface area.
Thick film technology also gives designers the ability to zone heater circuits and
reduce potential hot and cold spots resulting from boundary conditions.
Pump line heaters
Silicon rubber
heaters
Large panel thick film heaters
2 - Heater Solutions
Pump Line Heaters
Watlow’s pump line heating systems work to reduce buildup of solids in LPCVD,
PECVD and metal etch vacuum piping systems. This reduction in buildup helps
reduce particle generation and eliminates unscheduled maintenance downtime;
therefore, improving the consistency of yields and ultimately saving time and money.
Watlow’s pump line heating systems are compliant with global guidelines and
specifications including CE, NEC, UL
®
and SEMI S2-93.
• Even heating up to 200°C (392°F) eliminates cold spots
• Modular heating system combines standard parts to cover custom lines
• Easy on-off with reclosable fasteners simplifies installation
• Reinforced silicone rubber fabric used on both heater and jacket
• Precision electronic temperature controllers and software available for changing
pr
ocess requirements
• UL
®
, CE, NEC and SEMI S2-93 compliant
Features
